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Application Examples

Semiconductor Cleaning Equipment I/O and Safety Measures

Various signal conditioners are used in semiconductor related manufacturing processes. In addition, we introduce here an application of the R8 Series Remote I/O modules with interlocking function, which have been developed by a customer’s requirement for cleaning equipment.
In normal conditions, I/O signals are processed via network (EtherCAT).
However, in an event of malfunction, specific or all output signals can be turned off by an interlocking command contact input. The equipment can be halted by direct local control without using the communication network.

Remote I/O for Semiconductor Cleaning Equipment

Remote I/O for Semiconductor Cleaning Equipment

Slice Type, Mixed Signal Remote I/O
R8 Series

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R8 Series
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